W 4f (and W 5p3/2) XPS spectrum for tungsten metal. An example using the LA lineshape and a 20 eV pass energy is shown in Figure 1.įigure 1. Peak area ratios and FWHM's can be obtained from the CasaXPS ready file of tungsten metal. The W 5p3/2 peak is set at 5.5 eV above the W 4f7/2 peak. When fitting the metal component of a W 4f spectrum containing the metal and additional oxide species an additional component corresponding to the W 5p3/2 peak must be factored in (but remember to set its RSF to 0). The metal peak is found at ~31.3 eV and has an asymmetric peak-shape with a FWHM (full-width at half maximum) of 0.38 to 0.46 eV depending on the lineshape and pass energy used. Binding energy values for the W 4f7/2 peak-shape are based on a survey of literature values (NIST database) and on standard reference materials (WO3 and W metal) analyzed using similar spectrometer conditions.
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